Products Introduction
- TiCl4 Trap
- W Trap
- ACL Trap
- Etch Trap
- Others(Cold Trap, Noa Trap, Heating Trap)
- Controller & Data Transmission
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TiCl4 ALD/TiN Trap
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Advantage
- High Efficiency
- Customizing
- PM Cycle : more than 6 Months
- Applied Process : TF TiCl4 ALD/TiN Process
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Hardware Spec.
- Product Size
- Trap : customizing
- Controller : customizing
- Outer Tank : customizing
- Inner tank : customizing
- Heater
- Sheath Type
- Operating Temp. : 150℃~300℃
- Controller
- Channel : 1CH ~ 4CH
- Safety Interlock System
- Product Size
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TiCl4 ALD/TiN Non-Stop Trap
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Advantage
- High Efficiency
- Customizing
- Easy Exchange
- PM Cycle : more than 6 Months
- Applied Process : TF TiCl4 ALD/TiN Process
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Hardware Spec.
- Product Size
- Trap : customizing
- Controller : customizing
- Outer Tank : customizing
- Inner tank : customizing
- Heater
- Sheath Type
- Operating Temp. : 150℃~300℃
- Controller
- Channel : 1CH ~ 4CH
- Safety Interlock System
- Product Size
-
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Advanced Trap (Now developing)
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Advantage
- High Efficiency
- Customizing
- PM Cycle : more than 6 Months
- Applied Process : TF TiCl4 ALD/TiN Process
-
Hardware Spec.
- Product Size
- Trap : customizing
- Controller : customizing
- Outer Tank : customizing
- Inner tank : customizing
- Heater
- Sheath Type
- Operating Temp. : 150℃ ~ 300 ℃
- Controller
- Channel : 1CH ~ 4CH
- Safety Interlock System
- Product Size
-