제품소개
- TiCl4 Trap
- W Trap
- ACL Trap
- Etch Trap
- 기타(Cold Trap, Noa Trap, Heating Trap)
- Controller & Data Transmission
-
TiCl4 ALD/TiN Trap
-
Advantage
- 효율이 높다
- Customizing 가능
- PM주기 : 6개월 이상
- Applied Process : TF TiCl4 ALD/TiN공정
-
Hardware Spec.
- Product Size
- Trap : customizing 대응가능
- Controller : customizing 대응가능
- Outer Tank : customizing 대응가능
- Inner tank : customizing 대응가능
- Heater
- Sheath Type
- Operating Temp. : 150℃~300℃
- Controller
- Channel : 1CH ~ 4CH
- Safety Interlock System
- Product Size
-
-
TiCl4 ALD/TiN Non-Stop Trap
-
Advantage
- 효율이 높다
- Customizing 가능
- 장비 Down 없이 Trap 교체 가능
- PM주기 : 6개월 이상
- Applied Process : TF TiCl4 ALD/TiN 공정
-
Hardware Spec.
- Product Size
- Trap : customizing 대응가능
- Controller : customizing 대응가능
- Outer Tank : customizing 대응가능
- Inner tank : customizing 대응가능
- Heater
- Sheath Type
- Operating Temp. : 150℃~300℃
- Controller
- Channel : 1CH ~ 4CH
- Safety Interlock System
- Product Size
-
-
Advanced Trap (개발중)
-
Advantage
- 효율이 높다
- Customizing 가능
- PM 주기 : 6개월 이상
- Applied Process : TF TiCl4 ALD/TiN
-
Hardware Spec.
- Product Size
- Trap : customizing 대응가능
- Controller : customizing 대응가능
- Outer Tank : customizing 대응가능
- Inner tank : customizing 대응가능
- Heater
- Sheath Type
- Operating Temp. : 150℃ ~ 300 ℃
- Controller
- Channel : 1CH ~ 4CH
- Safety Interlock System
- Product Size
-