제품소개
- TiCl4 Trap
- W Trap
- ACL Trap
- Etch Trap
- 기타(Cold Trap, Noa Trap, Heating Trap)
- Controller & Data Transmission
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ACL Trap ( Slim type )
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Advantage
- 효율이 높다
- Customizing 가능
- SPACE Benefit
- PM주기 : 6개월 이상
- Applied Process : Thin Film ACL 공정
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Hardware Spec.
- Product Size
- Trap : customizing 대응가능
- Controller : customizing 대응가능
- Outer Tank : customizing 대응가능
- Inner tank : 30ℓ ~ 80ℓ
- Heater
- Sheath Type
- Operating Temp. : 150℃ ~ 300 ℃
- Controller
- Channel : 1CH ~ 6CH
- Safety Interlock System
- Product Size
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ACL Trap ( Large )
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Advantage
- 효율이 높다
- Customizing 가능
- TOP COOLING TYPE
- PM주기 : 6개월 이상
- Applied Process : Thin Film ACL 공정
-
Hardware Spec.
- Product Size
- Trap : customizing 대응가능
- Controller : customizing 대응가능
- Outer Tank : customizing 대응가능
- Inner tank : 80ℓ ~ 120ℓ
- Heater
- Sheath Type
- Operating Temp. : 150℃ ~ 300 ℃
- Controller
- Channel : 1CH ~ 6CH
- Safety Interlock System
- Product Size
-